Sample observation method and transmission electron microscope

ABSTRACT

Preparations are made for the transmission image of an object tilted as a reference image and the image obtained by polar coordinate conversion of this transmission image, and correlation is established with the image obtained by polar coordinate conversion of the transmission image of the object in a sample.

FIELD OF THE INVENTION

The present invention relates to a transmission electron microscope andsample observation method using the same, particularly to a transmissionelectron microscope and sample observation method using the same capableof selecting a targeted sample from the field of view including thesamples tilted in various angles.

RELATED ART

The sample observed by the transmission electron microscope is inclinedin various directions with respect to the electron beam incomingdirection. Accordingly, even in the samples having the same3-dimensional structure, the transmission image may take on a hexagonalform or an octahedral form, depending on the state of inclination, as inthe case of a virus particle having a regular dodecahedron. As describedabove, it requires experience and intuition of an observer and takes alot of time to find out a sample having a particular form in a field ofview where a great number of samples of different shapes are present.For a sample having a polyhedral structure, the profile of thetransmission image varies according to the tilt angle of the sample.This makes it difficult to determine if a sample having bee found outhas the desired profile.

One of the ways to solve this problem is to observe the 3-dimensionalstructure of a sample. To observe the three-dimensional structure of asample using a transmission electron microscope, a stereo-viewer is usedto observe two stereoscopic photographs obtained by tilting the sampleby a certain angle in the positive and negative directions.

The Patent Document 1 describes the method of using a scanning electronmicroscope to determine the position of the targeted pattern accordingto the degree of similarity with a register pattern. The detectedpattern position can be detected only from the positional relationshipwith the registered pattern. Further, all conditions for reproducing theimage of the detected position including the observation conditions aredetected using the position relationship (offset) with respect to thedetected pattern. The perfect compatibility between the detected patternand its position is not taken into account. When the sample once takenout is put back into the electron microscope to be searched again, theoffset must be set again since the registered pattern by offset is set.Further, no consideration is given to the pattern when the sample istilted. When the sample is rotated, there is a deviation in thepositional relationship between the registered pattern and detectedpattern. Accordingly, the offset registered in advanced becomes invalid.Patent Document 1:Japanese Patent Laid-open Publication No. 09-245709(1997).

The aforementioned prior art fails to give consideration to the work offinding out a targeted object where the apparent profile of the objectvaries according to the tilt angle of a sample. This has raised problemsin the accuracy of sample searching. Namely, a stereoscopic pair isobtained by tilting the sample in the positive and negative directionswith respect to optical axis, and is observed by a stereo-viewer,thereby observing the three dimensional structure of the object. Thismethod has the defect of being too intuitive and is inferior inscientific precision. An attempt is often made to provide a schematicrepresentation of the structure by line drawing. This method depends onmanual work and is hence used only as supplementary means for graspingthe three-dimensional structure.

SUMMARY OF THE INVENTION

An object of the present invention is to provide a transmission electronmicroscope that permits accurate and efficient selection of a targetedobject from the field of view including objects tilted in variousangles, and reproduces the observation conditions for the targetedobject whenever required.

DESCRIPTION OF THE INVENTION

To achieve the aforementioned object, the present invention provides asample observation method comprising a step of recognizing the image ofan object in the transmission electron beam image of a sample bycomparing it with a previously stored reference image. This sampleobservation method is characterized by further comprising the steps ofspecifying an object in the transmission electron beam image whereinmultiple pairs of transmission electron beam images of multiple objectshaving a different tilt angle with respect to the optical axis arestored as the reference images for the objects; computing thecorrelation between the specified object image and the reference image;and displaying the result of computation.

The sample observation method provided by the present inventioncomprises a step of recognizing the image of an object in thetransmission electron beam image of a sample by comparing it with apreviously stored reference image. This sample observation method ischaracterized by further comprising the steps of specifying an object inthe transmission electron beam image wherein multiple images formed bypolar coordinate conversion of transmission electron beam images ofmultiple objects are stored as the reference images; carrying out polarcoordinate conversion of the image of the specified object; computingthe correlation of the images between the specified object image havingbeen subjected to polar coordinate conversion and the reference image;and displaying the result of computation.

The electron beam transmission image of an object is preferred to becomposed of a set of multiple electron beam transmission images of theobject having different tilt angles with respect to optical axis. Inthis case, the image having been subjected to the polar coordinateconversion is prepared for each of multiple electron beam transmissionimages of the object having different tilt angles with respect tooptical axis. The rotary fulcrum for polar coordinate conversion of theobject image may be specified in the transmission electron beam images.

The result of computing the correlation of the images can be displayedin terms of the degree of agreement between images. It can be displayedin various ways; by listing in the descending order of the degree ofagreement; by displaying images according to class wherein the degree ofagreement is classified into several classes having a certain range; andby listing such identifiers as image names and the degrees of agreement.

The sample observation method for searching the same objects in multipleobjects in the transmission electron beam images of a sample accordingto the present invention comprises steps of selecting multiple objectsin the transmission electron beam images of a sample; carrying out polarcoordinate conversion of each of the selected multiple object images;specifying one of the multiple objects; computing the correlationbetween the image of the specified object subsequent to polar coordinateconversion and the images of other objects subsequent polar coordinateconversion; and displaying the result of computation.

It is preferred that the apparatus data items during transmissionelectron beam photographing of a sample be stored in the form associatedwith transmission electron images of the sample in a one-to-onerelationship. This can be achieved, for example, by storing thetransmission electron beam images of the sample as images in the TIFFformat including the tag area and storing the apparatus data in the tagarea. When this method is utilized, the apparatus data stored in the tagarea can be set in the transmission electron microscope and theconditions for photographing the transmission electron beam imagesincluding the targeted object can be reproduced.

The present invention ensures efficient and accurate searching of thetargeted sample by selecting the specific object image based on thedegree of agreement with the reference image and reproducing theobservation conditions on the electron microscope automatically.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram representing an example of the configurationof a transmission electron microscope according to the presentinvention;

FIGS. 2(a) and 2(b) are diagrams representing the spectrum of acorrelative intensity image;

FIGS. 3(a) through 3(c) are schematic views showing polar coordinateconversion;

FIGS. 4(a) through 4(c) illustrate an example of polar coordinateconversion where a point on the contour of an image on the X-Y plane isused as an origin;

FIG. 5 is a flowchart showing the procedure of image record processing;

FIG. 6 is a flowchart showing the procedure of reference image recordregistration processing;

FIG. 7 is a diagram showing an example of listing the transmissionimages used as reference images;

FIG. 8 is a diagram representing the procedure of image recognition;

FIG. 9 is a flow chart representing the processing of image search;

FIGS. 10(a) through 10(c) are explanatory diagrams representing anexample of image search processing;

FIGS. 11(a) through 11(c) are explanatory diagrams representing anexample of searching the same object as the reference image in the fieldof view for the sample;

FIGS. 12(a) through 12(d) are explanatory diagrams representing anexample of processing wherein an object having the same profile as thatof the specified object is searched in the field of view for the sample;

FIG. 13 is a flowchart representing the procedure of image calling;

FIGS. 14(a) and 14(b) are diagrams representing a transmission imagewhere the origin for polar coordinate conversion is indicated; and

FIGS. 15(a) and 15(b) are diagrams representing a transmission imagewhere the origin for polar coordinate conversion is indicated on theimage having been subjected to binarization.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The following describes the embodiments of the present invention withreference to drawings:

FIG. 1 is a block diagram representing an example of the configurationof a transmission electron microscope according to the presentinvention;

The electron beam 3 emitted from the electron gun 2 of the transmissionelectron microscope 1 is applied to a sample S held by a sample stage 5,by means of an irradiation lens 4. The electron beam image having passedthrough the sample S is magnified by the object lens 6 and magnifyinglens system 7, and is projected in the TV camera 8. The TV camera 8 isequipped with a scintillator plate and image-capturing device such as aCCD. The electron beam image projected thereto is supplied to a TVcamera controller 16 and is converted into the image signal. The imagesignal is sent to the monitor 17 and is displayed on the monitor 17 asan image. Further, the image signal outputted from the TV cameracontroller 16 is supplied to an administration controller 18 and isstored as image data. The bottom of the transmission electron microscope1 is formed into a camera chamber 9 and a fluorescent screen 10 isarranged therein. The electron beam of a sample can be observed on thefluorescent screen 10 by causing the TV camera 8 to deviate from theoptical axis of the electron beam 3 by a TV camera drive 19.

The electron gun 2 is controlled by the electron gun controller 11,irradiation lens 4, object lens 6 and magnifying lens system 7 arecontrolled by an irradiation lens controller 12, an object lenscontroller 13 and a magnifying lens system controller 14, respectively.The sample stage 5 is controlled by a sample stage controller 15. Thesecontrollers 11 through 15 constitute an observation conditioncontroller. The controllers 11 through 15 constituting an observationcondition controller are connected to the administration controller 18via a transmission line to allow exchange of data. The observationconditions can be set from the administration controller 18. Theadministration controller 18 is provided with a computer loaded with acertain program, and the input means 20 such as a keyboard is connectedthereto. It generates the control data required for the control ofcontrollers 11 through 15.

The following describes the operation of the transmission electronmicroscope according to the present invention: The administrationcontroller 18 takes charge of four types of processing; image recording,image recognition, image search and image calling. Image recording isthe processing carried out when a desired sample is observed. Imagerecognition is the processing of making a decision on whether or not adesired object recorded by image recording is equal to the alreadystored image data (reference), or determining the data of referenceimage to which the desired object corresponds. Image search is theprocessing of finding out the reference object to which a desired objectcorresponds, or the object having the same profile as that of thedesired object among multiple predetermined objects. Image calling isthe processing of reproducing and observing the observation conditionsfor the searched object.

In the preferred embodiment of the present invention, an imagecorrelation is utilized to determine the similarity between thetransmission image of the object in the samples and reference image. Thefollowing describes the outline of the phase-restricted correlation anexample of the image correlation. Phase-restricted correlation isdefined as one of the image computations modified in such a way that theamplitude component of the input image is replaced by the fixed value,in the computation process of correlation using the Fourier transform.(“Principle of phase-restricted correlation and its application”; by T.Kobayashi, Technical Report of Television Institute of TelevisionEngineers of Japan. pp 1-6, No. 41, Vol. 20 (1996)). Only the phasespectrum is extracted out of the amplitude spectrum and phase spectrumobtained by the discrete Fourier transform of the image (transmissionimage), and the correlation image is obtained by inverse Fouriertransform.

When there are two transmission images f1(m, n) and f2(m, n), thediscrete Fourier images F1(u, v) and F2(u, v) can be defined by thefollowing equations, respectively. In this case, m=0, 1, 2, . . . , M−1:n=0, 1, 2, . . . N−1: u=0, 1, 2, . . . , M−1; v=0, 1, 2, . . . , N−1.A(u, v) and B(u, v) denote the amplitude spectrum, while θ(u, v) andφ(u, v) indicate the phase spectrum. $\begin{matrix}{\left\lbrack {{Mathematical}\quad{Formula}\quad 1} \right\rbrack{{{F1}\left( {u,v} \right)} = {{\sum\limits_{m = 0}^{M - 1}\quad{\sum\limits_{n = 0}^{N - 1}{{{f1}\left( {m,n} \right)}\quad{\mathbb{e}}^{{- {j2}}{({\frac{m\quad u}{M} + \frac{m\quad v}{N}})}}}}} = {{A\left( {n,v} \right)}{\mathbb{e}}^{{j\theta}{({u,v})}}}}}} & (1) \\{{{F2}\left( {u,v} \right)} = {{\sum\limits_{m = 0}^{M - 1}\quad{\sum\limits_{n = 0}^{N - 1}{{{f2}\left( {m,n} \right)}\quad{\mathbb{e}}^{{- {j2}}{({\frac{m\quad u}{M} + \frac{m\quad v}{N}})}}}}} = {{B\left( {n,v} \right)}{\mathbb{e}}^{{j\phi}{({u,v})}}}}} & (2)\end{matrix}$

In the phase-restricted correlation, the amplitude spectra A(u, v) andB(u, v) of F1(u, v) and F2(u, v) are used as fixed values; therefore,the images having only the phase information are obtained. Assuming thatthese phase images are F1′(u, v) and F2′(u, v), definition is given byEq. (3) and (4):

[Mathematical Formula 2]F 1′(u,v)=e ^(jθ(u,v))  (3)F 2(u,v)=e ^(jφ(u,v))  (4)

The composite image H12(u, v) is obtained by multiplying the phase imageF1′(u, v) by the complex. conjugate of F2′(u, v). To be more specific,the phase difference is calculated for each pixel, as shown in Eq. 5.$\begin{matrix}{\left\lbrack {{Mathematical}\quad{Formula}\quad 3} \right\rbrack\begin{matrix}{{{H12}\left( {u,v} \right)} = {{{F1}^{\prime}\left( {u,v} \right)}\left( {{F2}^{\prime}\left( {u,v} \right)} \right)^{*}}} \\{= {\mathbb{e}}^{j{({\theta - \phi})}}}\end{matrix}} & (5)\end{matrix}$

The correlative intensity image is obtained by inverse Fourier transformof the composite image, and is given by Eq. (6), provided that r=0, 1,2, . . . M−1; s=0, 1, 2, . . . , N−1. $\begin{matrix}{\left\lbrack {{Mathematical}\quad{Formula}\quad 4} \right\rbrack\begin{matrix}{{{G12}\left( {r,s} \right)} = {\sum\limits_{m = 0}^{M - 1}\quad{\sum\limits_{n = 0}^{N - 1}\quad{\left( {{H12}\left( {u,v} \right)} \right){\mathbb{e}}^{{j2}{({\frac{\quad{u\quad r}}{M} + \frac{v\quad s}{N}})}}}}}} \\{= {\sum\limits_{m = 0}^{M - 1}\quad{\sum\limits_{n = 0}^{N - 1}{\left( {\mathbb{e}}^{j{({\theta - \phi})}} \right){\mathbb{e}}^{{j2}{({\frac{\quad{u\quad r}}{M} + \frac{v\quad s}{N}})}}}}}}\end{matrix}} & (6)\end{matrix}$

The phase-restricted correlation is completely immune from imagebrightness. So the apparent thickness of the sample varies according tothe tilt angle of the sample, and there is no need of readjusting theirradiation conditions, even if the irradiation conditions are changed.

FIG. 2 is a diagram representing the spectrum of the correlativeintensity image an example of the result of correlation obtained fromphase-restricted correlation. FIG. 2(a) indicates the correlativeintensity peak when similarity between two images is high. FIG. 2(b)indicates the correlative intensity peak when similarity between twoimages is not very high. As shown above, the similarity of images can beevaluated according to the height of the correlative intensity imagepeak. When images are perfectly equal to each other, the height of theautocorrelation peak is assumed as 100 or 1, and the relative peakheight with respect to it can be expressed as the degree of agreement.

The transmission image of the object as an item to be searched may beturning about optical axis with respect to the reference image. To finda correlation between the object image and reference image in this case,one can find a phase-restricted correlation between the object imagehaving been subjected to polar coordinate conversion and referenceimage.

FIG. 3 is a schematic view showing polar coordinate conversion. Thecoordinates (x, y) of the X-Y plane can be expressed by the followingpolar coordinates (r, θ):

[Mathematical Formula 5]r=√{square root over (x ² +y ² )}  (7)$\begin{matrix}{è = {\arctan\frac{y}{x}}} & (8)\end{matrix}$

Let us consider the case where the objects of the same profile rotateabout the origin on the X-Y plane. For example, consider the case wherethe rectangular object 31 whose apex was located at (r₁, θ₁) shown inFIG. 3(a) has rotated about the coordinate origin by angle α, as shownin FIG. 3(b). Then the apex (r₁, θ₁) of the rectangular object 31 islocated at point (r₁, θ₁+α) for the rectangular object 32 having rotatedby angle α. Similarly, a given point (r, θ) on the object 31 shown inFIG. 3(a) goes to the point (r, θ) of the object 32 having rotated, asshown in FIG. 3(b). The object before and after rotation is plotted onthe two-dimensional coordinates where “r” is assigned on the verticalaxis and θ on the horizontal axis. This will provide the objects 33 and34 shown in FIG. 3(c). To be more specific, rotation about the origin inthe X-Y plane is converted into the parallel motion in the θ directionin the two-dimensional coordinate system having undergone polarcoordinate conversion. Therefore, when comparison is made between theimages subjected to polar coordinate conversion, similarity between twoimages can be obtained without being affected by rotation about theorigin on the X-Y plane.

However, when the image on the X-Y plane is subjected to polarcoordinate conversion so that it is converted to an image on the r-θplane, the profile of the image on the r-θ plane varies according towhere the origin is set. Accordingly, the origin when the transmissionimage of the object is subjected to polar coordinate conversion must beequal to the origin when the reference image is subjected to polarcoordinate conversion. Thus, it is possible to specify a certain pointin the image as a fulcrum so that “r” will be made constant by thetransmission image of the object and reference image, and to captures animage having a certain size around it, whereby this image is subjectedto polar coordinate conversion. For a digital image photographed by aCCD camera or the like, for example, the characteristic point of theimage can be specified as an origin by manual operation by observing iton a monitor.

FIG. 14 shows an example of extracting the characteristic point using anactual sample. The image is obtained by photographing the transmissionelectron beam image of a sample by a CCD camera. The transmission imageof FIG. 14(a) is the reference image. The characteristic point of thetransmission image is indicated by an arrow mark. This point is assumedas an origin of the polar coordinate, and conversion processing isapplied. To capture the characteristic point, the image can be subjectedto binarization. FIG. 15 is an example of binarization of the imageshown in FIG. 14. The characteristic point extracted by binarization isindicated by an arrow mark. This can be used as an origin.

FIG. 4 is a drawing an example of polar coordinate conversion where apoint on the contour of an image on the X-Y plane is used as an origin.Consider the case where the rectangular object 41, where one apex waspositioned at the origin on the X-Y plane as shown in FIG. 4(a), hasrotated about the coordinate origin by angle β as shown in FIG. 4(b).The object before and after rotation is plotted on the two-dimensionalcoordinate where “r” is assigned to the vertical axis and the “θ” on thehorizontal axis. This will provide images 43 and 44 having the sameprofile where they are moved in parallel displacement by angle β in theθ direction, shown in FIG. 4.

The following describes the processing of image recording, imagerecognition, image search and image calling according to the presentinvention:

The processing of image recording will be described first using theflowchart given in FIG. 5. An operator prepares a sample S to beobserved, and operates a transmission electron microscope to set theobservation conditions. Then the operator captures the enlarged image ofa desired portion of the sample S using a TV camera 8. The operation inthis case is carried out using input means 20 such as a keyboard. Theoperator enters the required control data into the electron guncontroller 11, irradiation lens controller 12, object lens controller 13and magnifying lens system controller 14 so that the desiredacceleration voltage, scaling factor and observation mode can beobtained. Control data is also entered into the sample stage controller15 and the sample stage 5 is operated in such a way that the desiredportion of the sample 6 will be in the field of view.

The above operations will provide the image on the desired portion(coordinate) of the sample S according to desired conditions. When theimage of a desired portion of the sample S under desired conditions isobtained, the operator performs the operation required to record theimage in the administration controller 18 (S11). The administrationcontroller 18 memorizes the transmission image of the sample capturedfrom the TV camera 8 into the memory and stores it therein (S13). Theobject image captured through the TV camera 8 may be stored after it hasbeen converted into the data of TIFF format. In this case, it is alsopossible to make such arrangements that, in parallel with storage ofimage data in Step 13, the administration controller 18 captures theobservation conditions as data from the controllers 11 through 15, andthis data is stored in the tag area of the TIFF format as the tag dataof the image data (S14). The observation conditions for storing the tagdata into the tag area includes acceleration voltage, scaling factor,emission current, spot size, sample position coordinate, exposure timeand the amount of exposure.

The following describes the processing of registering the referencedimage with reference to the flowchart given in FIG. 6: Multipletransmission images of an object previously captured by tilting inmultiple directions, and an image obtained by polar coordinateconversion of the transmission image, as will be described later, can beused as reference images. Further, a reference image can be created fromthe object itself contained in the sample S. In this case as well, thetransmission image with the sample tilted for the object to be searchedfrom samples and the image obtained from the transmission image havingbeen subjected to polar coordinate conversion are registered asreference images.

When the tilt angle is zero degree without the sample state being tiltedwith respect to the optical axis, the transmission image of the object(reference image) is recorded (S21). Then the sample stage is tilted torecord the transmission image of an object tilted at various angles(S22). After that, the reference image at a tilt angle of 0 degree andthe reference image tilted at various angles are subjected to polarcoordinate conversion, thereby obtaining an image (S23). Further, theimage signal of the reference signal is converted into the TIFF format,and is stored in the administration controller 18 (S24). In parallel tothe storage of the administration controller 18, the administrationcontroller 18 captures the image observation condition as data from thecontrollers 11 through 15, and the captured data is stored as tag dataof the image data in the tag area of TIFF format (S25). In the mannerdescribed above, the transmission image of the object tilted at variousangles and the image obtained by polar coordinate conversion of suchtransmission image are used to create the image database of thereference image.

FIG. 7 is a diagram showing an example of listing the transmissionimages used as reference images. In this figure, a virus is used as anobject. The tilted transmission image of the object tilted at variousangles with respect to the optical light and the image having beensubjected to polar coordinate conversion are used as a database for thereference image. For example, the transmission images of virus A gainedby tilting in a certain direction within the tilt angle of ±60 deg. inincrements of 30 deg. are assumed as reference images Ra1, Ra2, Ra3, Ra4and Ra5 of virus A. The transmission images gained by polar coordinateconversion of these images are registered as reference images RAa1,RAa2, RAa3, RAa4 and RAa5. A similar step is taken for virus B. Namely,the transmission images of virus B gained by tilting in a certaindirection within the tilt angle of ±60 deg. in increments of 30 deg. areregistered as reference images Rb1, Rb2, Rb3, Rb4 and Rb5 of virus B.The transmission images gained by polar coordinate conversion of theseimages are registered as reference images RAb1, RAb2, RAb3, RAb4 andRAb5 of virus B. Similarly for virus C, the transmission images of virusC gained by tilting in a certain direction within the tilt angle of ±60deg. in increments of 30 deg. are assumed as reference images Rc1, Rc2,Rc3, Rc4 and Rc5 of virus C. The transmission images gained by polarcoordinate conversion of these images are registered as reference imagesRAc1, RAc2, RAc3, RAc4 and RAc5.

The following describes the processing of image recognition withreference to FIG. 8: Image recognition is the processing carried out tocompare between the transmission image of a desired sample and referenceimage. The sample is observed (S31) and the transparent image of adesired area in the samples is recorded (S32). Images are obtained bypolar coordinate conversion of an object in the transmission images(S33). The transmission images and images subsequent to polar coordinateconversion are stored (S34). After that, comparison is made between thetransmission images of the desired object in the sample images andreference images (S35). Comparison can be made using the correlation ofimages as in the phase-restricted correlation method. It is preferredthat the correlation be found among images subsequent to polarcoordinate conversion, because it is not affected by the rotation of theobject. The result of image correlation can be displayed to representthe degree of agreement among images (S36).

The following describes the processing of image search: Image search isthe processing of finding out the reference to which a desired objectcorresponds, or finding out a sample having the same profile as adesired object that is assumed as a reference. The scaling factor of thereference image and that of the image to be searched is preferred to bethe same in principle. Should the scaling factor be changed, it ispreferred that the scaling factor of the image be adjusted by ensuringthat the observation condition for the reference image can be referencedin advance, when the sample image is recorded in the step of imagerecording.

FIG. 9 is a flow chart representing the processing of image search. Inimage search, the image database of a reference image is selected (S41).This reference image contains the transmission image of the sampleitself to be searched and its tilted transmission image. Based on thedegree of agreement of images displayed after processing of imagerecognition, a reference image closely correlated with the desiredsample is selected (S42) and the selected transmission image isdisplayed (S43).

It is also possible to make such arrangements that the image of anobject in the samples to be searched is correlated with the referenceimage, and the image is classified by comparison. Images be classifiedaccording to the database of the reference image; for example, the imageof the object in the sample is the transmission image of virus A tiltedby +30 deg. which is further rotated by θ deg. by polar coordinateconversion. It is also possible to classify multiple samples, assuming acertain sample as a reference. It is also possible to find out a samplehaving the same profile as the reference sample from multiple samples byassuming a certain sample as a reference.

Referring to FIG. 10, the following describes an example of searchingthe image: In the first plate, the transmission image of a desiredobject contained in the sample is captured and stored. Assume that thetransmission image of the object shown in FIG. 10(a) is to be searchedas a transmission image. An image is obtained by polar coordinateconversion of the transmission image of the object, and is also stored.Then the database of the reference image is selected. Let us assume herethat the database of the reference images for viruses A, B and C givenin FIG. 7 has been selected. The result of search is outputted as thelist showing the result of image correlation (degree of agreement) withthe reference image.

FIGS. 10(b) and 10(c) are the diagrams representing the examples of theresult of search processing. FIG. 10(b) shows an example of listing theresults of correlation between the sample image and individual referenceimages stored in the database, where these results are ranked accordingto the degree of agreement in the descending order. FIG. 10(c) is anexample of listing the results of correlation between images, for eachreference image in the database. According to this example, it is highlypossible that the object in the sample is virus B.

FIG. 11 is an explanatory diagram representing an example of searchingthe same object as the reference image in the field of view for thesample containing multiple objects.

In the first place, the field of view for the sample containing multipleobjects are photographed and recorded, as shown in FIG. 11(a). Thenmultiple objects are selected from that field of view. When objects areselected, the objects can be enclosed by a frame having a certain sizeif the image is photographed by a CCD camera as illustrated in FIG.11(b). The selected objects can be numbered as illustrated. In thisexample, six objects are selected.

This is followed by the step of selecting the reference image to besearched, from the reference image database. Here the series of virus Bgiven in FIG. 7 are specified as reference images, by way of an example.Then selected objects are correlated with reference images, and theresults are indicated. As shown in FIG. 11(c), the result is displayedin terms of the degree of agreement between the objects selected fromthe sample and reference image. To display the result of search, it isalso possible to make such arrangements that the degree of agreement isprovided with a threshold value in advance, and only the results ofresearch where the degree of agreement has exceeded the threshold valueare outputted. In this example, the results of search indicate a highpossibility that objects Nos. 002 and 003 in the sample are viruses B.It can be seen that there is also a high possibility of objects Nos. 006and 001 being viruses B as well.

FIG. 12 is an explanatory diagram representing an example of processingwherein an object having the same profile as that of the object issearched in the field of view for the sample containing multipleobjects, with the object in the sample assumed as a reference.

The field of view for the sample containing multiple objects arephotographed and stored as shown in FIG. 12(a). Then a desired objectsample is selected from the field of view. As shown in FIG. 12(b) theobject is selected by enclosing the frame by a mouse. The selectedobject can be assigned with an appropriate number.

Then one object out of multiple selected objects is used as a targetobject, and its transmission image and the image obtained by polarcoordinate conversion of the transmission image are used as referenceimages. Correlation is established with the remaining objects havingbeen selected. For the transmission images of the objects other than thetarget object, the image having been subjected to polar coordinateconversion is prepared and computation of image correlation is carriedout between transmission images and between images having been subjectedto polar coordinate conversion. As a result, the object having the sameprofile as that of the target object is found out. FIG. 12(d) shows anexample of displaying the search result. In this example, the objecthaving the same profile as that of the object No. 002 found out in thesample is searched in the sample. It can be seen that there is a highpossibility that the object No. 003 is relevant. The illustrated exampleshows the case where the unmodified profile is used as a referencewithout the sample being tilted at multiple angles. It is also possibleto tilt the sample at various angles and to record the transmissionimages of the object, as required, thereby using them as referenceimages, together with the images having been subjected to polarcoordinate conversion.

The following describes the processing of image calling with referenceto FIG. 13: Image calling is the processing applied to reproduce theobservation condition of the searched object for observation. The imagedata of the searched object is converted into the TIFF format and isstored in the administration controller 18. The image data of the TIFFformat has the observation conditions of the image stored in the tagarea.

When a searched image is specified, the image data of the samplespecified by the administration controller 18 is called up (S51). Thenthe administration controller 18 supplies this image to the monitor 17so that the searched image stored is displayed on the monitor screen.Whenever required, the administration controller 18 calls up the tagdata from this image data (S52), and supplies to the electron guncontroller 11 and lens controllers 12 through 14, the control datarepresenting the observation conditions such as acceleration voltage andscaling factor in the tag data (S53). This allows the sample stage 5 tomove in such a way as to get the field of observation of the sample Sspecified by the tag data. Control is made to get the accelerationvoltage, scaling factor, measurement mode (e.g. diffraction mode, highresolution mode, enhanced contrast mode or extra-low powered mode),thereby permitting observation of the same field of view as that of therecorded image (S54).

According to this method, when the sample S contains objects tilted invarious angles with respect to the direction of incoming electron beam,the reference image is compared with the projected image of the object,and the degree of agreement is evaluated quantitatively, whereby onlythe image tilted in a particular direction can be selected from thefield of view. This ensures efficient image analysis.

According to the prior art, an image is selected, for example, by theimage pattern matching technique. However, the prior art does not usethe arrangement of selecting the reference image to provide automaticselection of images based on the degree of agreement. Further, the imageis not provided with observation conditions; therefore, even if an imagehas been selected, the observation conditions of the selected imagecannot be reproduced for observation. In this case, the selected imagecannot be recorded again under the same conditions, using a film andother recording medium, for example. According to the present invention,however, the image data is converted into the data of TIFF format andthe observation conditions are stored in the tag area. This arrangementensures observation conditions corresponding to the image at all times,and the corresponding observation conditions are obtained by merecalling of the image data at the same time. Further, there is littlerestriction on the amount of data to be stored. This provides a perfectreproduction of the observation conditions in an easy manner.

The present invention ensures an accurate and efficient selection of atarget object out of the objects tilted at various angles. Further, itallows a recorded object image to be displayed, and permits theobservation conditions to be fed back to an electron microscope, therebyensuring easy and faithful reproduction of a recorded image on theelectron microscope.

1. A sample observation method comprising a step of recognizing an imageof an object in a transmission electron beam image of a sample bycomparing it with a previously stored reference image; said sampleobservation method characterized by further comprising the steps of:specifying the object in said transmission electron beam image;computing a correlation between said specified object image and thestored reference image; and displaying the result of computation fordifferent tilt angles; wherein multiple pairs of transmission electronbeam images of multiple transmission electron beam images of multipleobjects each having a different tilt angle with respect to the opticalaxis are stored as said reference images for said object.
 2. A sampleobservation method comprising a step of recognizing an image of anobject in a transmission electron beam image of a sample by comparing itwith a previously stored reference image; said sample observation methodcharacterized by further comprising the steps of: specifying the objectin said transmission electron beam image; carrying out polar coordinateconversion of image of said specified object; computing a correlationbetween said specified object image and the stored reference imagehaving been subjected to the polar coordinate conversion and saidreference image; and displaying the result of computation for differenttilt angles; wherein multiple pairs of transmission electron beam imagesof multiple transmission electron beam images of multiple objects havinga different tilt angle with respect to the optical axis are stored assaid reference images for said objects.
 3. The sample observation methodaccording to claim 2 further comprising a step of specifying a fulcrumfor rotation in the polar coordinate conversion of said object image, insaid transmission electron beam image.
 4. The sample observation methodaccording to claim 2 further characterized in that the transmissionelectron beam image of said object consists of multiple pairs oftransmission electron beam images of the objects having a different tiltangle with respect to the optical axis.
 5. The sample observation methodaccording to any one of claims 1 through 4 further characterized in thatsaid result of computation is displayed in terms of agreement betweensaid object image and said reference image.
 6. The sample observationmethod according to any one of claims 1 through 4 further characterizedin that the apparatus data at the time of photographing the transmissionelectron beam image of a sample is stored in a one-to-one relationshipwith the transmission electron beam image of said sample.
 7. The sampleobservation method according to claim 6 further characterized in thatsaid transmission electron beam image of the sample is stored as animage of TIFF format containing a tag area, and said apparatus data isstored in said tag area.
 8. The sample observation method according toclaim 6 further characterized in that the apparatus data stored in saidtag area is set on the transmission electron microscope, and theconditions for photographing the transmission electron beam imagecontaining said object are reproduced.
 9. A sample observation methodfor searching the same objects in multiple objects in transmissionelectron beam images of a sample, said method characterized bycomprising steps of: selecting multiple objects in said transmissionelectron beam images of a sample; carrying out polar coordinateconversion of each of said selected multiple object images; specifyingone of said multiple objects; computing a correlation between the imageof the specified object subjected to polar coordinate conversion and theimages of other objects subjected to the polar coordinate conversion;and displaying the result of computation; wherein multiple pairs oftransmission electron beam images of multiple transmission electron beamimages of said other objects each having a different tilt angle withrespect to the optical axis are stored.
 10. A transmission electronmicroscope comprising: an electron gun; an irradiation lens for applyingto a sample the electron beam discharged from said electron gun; and acontroller for storing the electron beam image having passed throughsaid sample; said transmission electron microscope further characterizedin that said controller stores a set of multiple transmission electronmicroscope images having different irradiation angles of said electronbeam as a reference image in advance; and electron beam is applied tosaid sample to form a set of multiple transmission electron microscopeimages having different irradiation angles; thereby computingcorrelation between the set of said multiple transmission electronmicroscope images and said reference image.